Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range
Статья в журнале
We present experimental results on the deposition of multi-layer heat-conducting coatings of aluminum oxide and aluminum nitride on silicon substrates. We estimate the time dependencies of the temperature increase for an uncoated substrate and for similar samples covered by this kind of multi-layer coating. The composition of the coatings and their thermal properties have been investigated.
Журнал:
- Ceramics International
- Elsevier Science Publishing Company, Inc. (Amsterdam)
- Индексируется в Scopus, Web of Science
Библиографическая запись: Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range / Y. G. Yushkov [et al.] // Ceramics International. – 2020. – Vol. 46. – Iss. 13. – P. 21190-21195. – DOI: 10.1016/j.ceramint.2020.05.197
Ключевые слова:
MULTI-COMPONENT BEAM-PRODUCED PLASMA ALUMINUM OXIDE CERAMICS ALUMINUM NITRIDE CERAMICS THERMAL CONDUCTIVITY OF CERAMICS ELECTRON BEAMИндексируется в:
- Scopus ( https://www.scopus.com/record/display.uri?eid=2-s2.0-85086398600&origin=resultslist )
- Web of science ( http://apps.webofknowledge.com/InboundService.do?customersID=LinksAMR&mode=FullRecord&IsProductCode=Yes&product=WOS&Init=Yes&Func=Frame&DestFail=http%3A%2F%2Fwww.webofknowledge.com&action=retrieve&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&SID=F6SlaQp3CGyKOSyVrHC&UT=WOS%3A000556283900065 )
- РИНЦ ( https://www.elibrary.ru/item.asp?id=43290018 )