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Parameters and properties of a pulsed planar vacuum magnetron discharge

Статья в журнале

We have developed a vacuum (gasless) magnetron discharge initiated by a vacuum arc plasma. The discharge operating conditions for different magnetron target materials have been determined. The mass-to-charge plasma composition and its evolution during a discharge current pulse were measured. It is shown that, after transient processes of cathode outgassing and purification, the plasma ion component consists mainly of singly-charged ions of the magnetron target material. The measured total ion current from the vacuum magnetron discharge plasma is up to 7.5% of the discharge current.

Журнал:

  • Vacuum
  • Elsevier Ltd (Oxford)
  • Индексируется в Scopus, Web of Science

Библиографическая запись: Parameters and properties of a pulsed planar vacuum magnetron discharge / A. V. Vizir [et. al.] // Vacuum. - 2020. - Vol. 178. - P. 109400. - DOI: 10.1016/j.vacuum.2020.109400

Индексируется в:

Год издания:  2020
Страницы:  109400 - 5
Язык:  Английский
DOI:  10.1016/j.vacuum.2020.109400