Electron beam evaporation of boron at forevacuum pressures for plasma-assisted deposition of boron-containing coatings
Статья в журнале
We describe the use of a plasma-cathode electron source for electron beam evaporation of boron at forevacuum pressures (10 Pa) with subsequent deposition of boron-containing coatings on a titanium substrate. We analyze the process of electron beam heating and evaporation of boron, study the mass-to-charge composition of the gas and boron beam-produced plasma, apply such plasma for coating deposition, and investigate the elemental composition of the deposited film and its microhardness.
Журнал:
- Journal of Applied Physics
- American Institute of Physics (College Park)
Библиографическая запись: Electron beam evaporation of boron at forevacuum pressures for plasma-assisted deposition of boron-containing coatings / Y. G. Yushkov [et. al.] // Journal of Applied Physics. – 2016. – Vol. 120. – Issue. 23. – С. 233302–233302. – DOI: 10.1063/1.4972268
Ключевые слова:
COATING DEPOSITION ELECTRON BEAM EVAPORATION PLASMA ASSISTED DEPOSITION TITANIUM SUBSTRATES BORON-CONTAINING CHARGE COMPOSITIONИндексируется в:
- Web of science ( http://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=1&SID=E5MdDnFkoSxoOYhLkaL&page=1&doc=1 )
- Scopus ( https://www.scopus.com/record/display.uri?eid=2-s2.0-85006965808&origin=resultslist&sort=plf-f&src=s&st1=Electron+beam+evaporation+of+boron+at+forevacuum+pressures+for+plasma-assisted+deposition+of+boron-containing+coatings&st2=&sid=ffddb58535a79cacd64c94b5d2261e9c&sot=b&sdt=b&sl=133&s=TITLE-ABS-KEY%28Electron+beam+evaporation+of+boron+at+forevacuum+pressures+for+plasma-assisted+deposition+of+boron-containing+coatings%29&relpos=0&citeCnt=2&searchTerm= )
- РИНЦ ( https://elibrary.ru/item.asp?id=29466452 )
- ВАК ( https://elibrary.ru/item.asp?id=29466452 )