Deposition of dielectric films on silicon using a fore-vacuum plasma electron source
Статья в журнале
We describe an experiment on the use of a fore-vacuum-pressure, plasma-cathode, electron beam source with current up to 100 mA and beam energy up to 15 keV for deposition of Mg and Al oxide films on Si substrates in an oxygen atmosphere at a pressure of 10 Pa. The metals (Al and Mg) were evaporated and ionized using the electron beam with the formation of a gas-metal beam-plasma. The plasma was deposited on the surface of Si substrates. The elemental composition of the deposited films was analyzed.
Журнал:
- Review of Scientific Instruments
- American Institute of Physics (College Park)
- Индексируется в Scopus, Web of Science
Библиографическая запись: Zolotukhin, D. B. Deposition of dielectric films on silicon using a fore-vacuum plasma electron source / D. B. Zolotukhin [et. al.] - Vol. 8. - Issue 6. - 2016. - P. 063302
Ключевые слова:
BEAM PLASMA INTERACTIONS DIELECTRIC FILMS ELECTRON BEAMS IONIZATION OF GASES OXYGEN ATMOSPHERE SI SUBSTRATES VACUUM PRESSURE DEPOSITED FILMSИндексируется в:
- Scopus ( https://www.scopus.com/record/display.uri?eid=2-s2.0-84974603599&origin=resultslist&sort=plf-f&src=s&st1=tyunkov&st2=&sid=4585cac9a4b05a786628b94689b429dc&sot=b&sdt=b&sl=20&s=AUTHOR-NAME%28tyunkov%29&relpos=5&citeCnt=0&searchTerm= )
- Web of science ( https://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=6&SID=E5MdDnFkoSxoOYhLkaL&page=1&doc=1 )
- РИНЦ ( https://elibrary.ru/item.asp?id=27121061 )
- ВАК ( https://elibrary.ru/item.asp?id=27121061 )