Gas-metal e-beam-produced plasma for oxide coating deposition at fore-vacuum pressures

Статья в журнале

This article describes an experiment on the deposition of oxide coatings on silicon and metal substrates from a gas-metal plasma. The plasma was produced by e-beam evaporation of metals (Mg, Al) with subsequent ionization of gas (oxygen) and evaporated material particles at fore-vacuum (1–10 Pa) pressures. We studied the ion composition and species fraction in the gas-metal plasma (using quadruple mass-spectrometry), as well as the thickness and surface resis￾tivity of the coatings

Журнал:

• Доклады ТУСУРа
• Томский государственный университет систем управления и радиоэлектроники (Томск)

Библиографическая запись: Gas-metal e-beam-produced plasma for oxide coating deposition at fore-vacuum pressures / D. B. Zolotukhin [et. al.] // Доклады ТУСУРа. – 2016. – Т. 19. – № 4. – С. 10-12. – DOI: 10.21293/1818-0442-2016-19-4-10-12.

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• РИНЦ ( https://elibrary.ru/item.asp?id=29028228 )
• ВАК ( https://elibrary.ru/item.asp?id=29028228 )