Energy efficient sensors based on carbon-modified silica films
Статья в сборнике трудов конференции
The article presents the results of the development of a model and design of an energy-efficient sensor based on porous carbon-modified SiO2 films. It is shown that carbon-modified SiO2 films have a highly developed specific surface area and high adsorption capacity. This made it possible to use them as an active layer of gas-sensitive sensors whose operation is based on a change in electrical conductivity during the adsorption of gases or water vapor.
Библиографическая запись: Sakharov, Y. Energy efficient sensors based on carbon-modified silica films / Y. Sakharov, P. Troyan, Y. Zhidik // Conference Proceeding 2019 International Siberian Conference on Control and Communications (SIBCON). - Tomsk: IEEE, 2019. - P. 8729582. - DOI: 10.1109/SIBCON.2019.8729582
Ключевые слова:
GAS SENSITIVE SENSORS POROUS METAL OXIDES CARBON-MODIFIED SIO2 FILMS ADSORPTION OF THIN FILMS.Конференция:
- 2019 International Siberian Conference on Control and Communications, SIBCON 2019
- Россия, Томская область, Томск, 18-20 апреля 2019,
- Международная
Издательство:
Tomsk State University of Control Systems and Radioelectronics
Россия, Томская область, Томск